Features of plasma composition and fluorine atom kinetics in CHF[3] + O[2]gas mixture
Efremov, A. M., Kwang-Ho Kwon, Bashmakova, D. E.
Features of plasma composition and fluorine atom kinetics in CHF[3] + O[2]gas mixture, A. M. Efremov, D. E. Bashmakova, Kwang-Ho Kwon
2 рис., 2 табл.
// Известия вузов. Химия и химическая технология .-
2023 .-
Т. 66, вып. 1. - С. 48-55 .-