Optical emission analysis of atmospheric pressure methane plasma chemical vapor deposition
Chang, Y. C., Wu, P. Y., Jhuang, J. C., Huang, C.
Optical emission analysis of atmospheric pressure methane plasma chemical vapor deposition, Y. C. Chang, P. Y. Wu, J. C. Jhuang, C. Huang
// Журнал прикладной спектроскопии .-
2021 .-
Т. 88, № 5. - С. 819 .-