Colloidal silica slurries preparation by ion exchange method for microelectronics application
Gaishun, V. E., Kosenok, Y. A., Tulenkova, O. I., Yanochkin, P. S., Savitskaya, T. A., Kimlenka, I. M.
Colloidal silica slurries preparation by ion exchange method for microelectronics application, Electronic resource
Minsk :
BSU ,
2021 .-
il.
Sviridov Readings - 2021, Minsk : BSU, 2021, P. 46, RU/IS/BASE/677238705, 978-985-881-061-0
